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XAN SA－1503、SA-1402-TS，SA-1403 slurry for the polishing of sapphire

Advantage:

1. High removal rate (>5μm/h)

2. Good surface quality: smooth, no obvious scratch.

3. Long life.

Application：Rough polishing and final polishing

Advantage:

1. Good surface quality: surface roughness (RMS) <1nm.

2. High removal rate (>3μm/h)

3. Easy to be cleaned

Application：Final polishing